SPECIFICATIONS
Model | MTM-3020MA | ||||
Working Table(mm) |
Metal table size | 500 x 330 | |||
Glass table size | 350 x 250 | ||||
X, Y-axis travel | 300 x 200 | ||||
Manual Z-axis travel (mm) | 120 | ||||
Automatic Z-axis travel (mm) | 2 | ||||
Dimension (mm) | 825 x 660 x 910 | ||||
Weight (kg) | 130 | ||||
Resolution (μm) | 0.5 | ||||
Motorized motion Z-axis
Resolution |
0.1μm | ||||
Indication error (μm) | E1XY=( 2.5+ L/100) μm (L is the length of the measured object. Unit: mm) | ||||
Lens magnification error | <=0.08% (including distortion) | ||||
Transmission illumination | Halogen lamp whose brightness is adjustable | ||||
Bottom illumination | LED whose brightness is adjustable | ||||
Eyepiece System | Video system | ||||
Lens magnification | 5X, 10X, 20X, 50X | 5X, 10X, 20X, 50X; 10X Mirau lens | |||
Eyepiece magnification | 10X dual lens cone | 1/2″CCD camera | |||
Total magnification | 50X ~500X | 142.5X ~1425X (19.5 inches display. Resolution: 1440 x
900) |
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Single layer transparent thickness measurement module | |||||
High resolution mode | Fast mode | ||||
Measuring range | 100nm ~300nm | 300nm ~500nm | 500nm ~3μm | 3μm ~20μm | |
Resolution | 5nm | 5nm | 7.5nm | 0.1μm |
Đánh giá
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